High-q Photonic Crystal Nanobeam Cavity Based on a Silicon Nitride Membrane Incor- Porating Fabrication Imperfections and a Low-index Material Layer
نویسندگان
چکیده
We detail the optimization of a nanobeam design and show how the fabrication imperfections can affect the optical performance of the device. Then we propose the design of a novel configuration of a photonic crystal nanobeam cavity consisting of a membrane structure obtained by sandwiching a layer of Flowable Oxide (FOx) between two layers of Silicon-Nitride (SiN). Finally, we demonstrate that the presence of a low refractive index layer does not impair the performance of the nanobeam cavity that still exhibits a Q factor and mode volume V of the order of 105 and 0.02 (λ/n)3, respectively.
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